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Yuko Kawaguchi

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Publications

1

Citations

55

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1

Active since

2005

Affiliations

Panasonic (Japan)(Current)

Yuko Kawaguchi is an author at Panasonic (Japan) specializing in applied physics, thin films, and optical properties.

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Publications per year

2005–2005

1

Publications

1

TeO<sub>X</sub>-Based Film for Heat-Mode Inorganic Photoresist Mastering

Eiichi Ito, Yuko Kawaguchi, Morio Tomiyama et al. · Japanese Journal of Applied Physics · 2005 · 55 citations

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