Acceleration sensitivity of tuning fork gyroscopes: theoretical model, simulation and experimental verification

Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

J.A. Geen, S. Sherman, John Chang et al. · IEEE Journal of Solid-State Circuits · 2002 · 272 citations

Engineering, Mass-produced Surface, Micromachines +14

Type I and Type II Micromachined Vibratory Gyroscopes

Andrei M. Shkel · 2006 · 150 citations

Engineering, Mechanical Engineering, Accelerometer +16

High Performance Matched-Mode Tuning Fork Gyroscope

Mohammed Fayyad Zaman, Ajit Sharma, Farrokh Ayazi · 2006 · 108 citations

Engineering, Measurement, Education +16

Integrated Microelectromechanical Gyroscopes

Huikai Xie, Gary K. Fedder · Journal of Aerospace Engineering · 2003 · 92 citations

Mems Vibratory Gyroscopes, Microelectromechanical Gyroscopes, Engineering +13

Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov et al. · 2011 · 90 citations

Electrical Engineering, Engineering, Microfabrication +13