S. Sherman

Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

J.A. Geen, S. Sherman, John Chang et al. · IEEE Journal of Solid-State Circuits · 2002 · 273 citations

Engineering, Electrical Engineering, Microelectronics +16

Integrated sensor and electronics processing for <10?8 "iMEMS" inertial measurement unit components

S. Lewis, Sameer Gul Alie, Tim Brosnihan et al. · 2004 · 66 citations

Engineering, Electrical Engineering, Materials Science +14

Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics

Tim Brosnihan, Stephanie Brown, A. Brogan et al. · 2004 · 31 citations

Engineering, Electrical Engineering, Actuators +16

Design rules for a reliable surface micromachined IC sensor

Stephen F. Bart, John Chang, T. Core et al. · 1995 · 22 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Gas cluster ion beam infusion processing of semiconductors

R. MacCrimmon, J. Hautala, M. Gwinn et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +8