Concepedia

Publication | Closed Access

Low temperature doping of poly-SiGe films with boron by co-sputtering

DOI

23

Citations

14

References

2000

Year

Emil V. Jelenković, W. Y. Cheung, I. H. Wilson, S.P. Wong, M.C. Poon
Thin Solid Films

References

YearCitations

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