Surface treatment of indium tin oxide by SF6 plasma for organic light-emitting diodes

Abstract

SF 6 plasma treatment of indium tin oxide highly improves the power efficiency and the stability of the organic light-emitting diode based on poly[2-methoxy-5-(2-ethylhexyloxy)-1,4phenylenevinylene]. The treatment leads to a slight reduction in the surface roughness and a decrease in the surface content of Sn. The major effect, however, has to do with the surface incorporation of fluorine. This fluorinated surface improves the hole injection and thus the device performance.