Calculation of Deposition Profiles and Compositional Analysis of Cosputtered Films

Abstract

Expressions have been derived from the Knudsen's cosine law for deposition profiles of finite-sized sputtering targets having the shapes of a segment of an annulus, sector of a disk, and a rectangle. The ability to calculate such profiles simplifies the recently published method of approximate compositional determination of multicomponent films, cosputtered from physically separated targets of different materials. The only data now required to calculate the composition of an entire sputtered film are the dimensions of the sputtering arrangement, the relative position of the targets, and a number of film thickness measurements equal to or greater than the number of sputtering targets.