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Publication | Open Access

Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

DOIFull Paper Access

14

Citations

23

References

2007

Year

V. Ioannou-Sougleridis, Panagiotis Dimitrakis, V. Em. Vamvakas, P. Normand, Caroline Bonafos, Anas Mouti, G. Ben Assayag, Vincent Paillard
Nanotechnology

Abstract

International audience

References

YearCitations

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