Publication | Closed Access
Sputtering rates and nanoscale cluster production in a hollow-cathode apparatus
12
Citations
14
References
1996
Year
Materials ScienceNanoscale SystemEngineeringPhysicsNanomaterialsMicrofabricationNanotechnologyNanomanufacturingApplied PhysicsSurface ScienceNanoscale Cluster ProductionNanostructuringVacuum DeviceNanoscale ScienceNanophysics
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