Thin Solid Films · 2004 · 28 citations · 1 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsThin FilmsPorous MaterialsSacrificial Layer ProcessingSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film MaterialsPorous SiliconSacrificial Layer DepositionSilicon Thin Films
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