Microelectron gun integrating a point-source cathode

Abstract

A structure integrating a sharp field emission tip inside a coaxial structure with an overall diameter as small as 60 μm is described. It can emit nA electron current with a minimum kinetic energy of 50 eV. It is demonstrated that this structure behaves like an electron gun and is able to produce a low-energy, divergent and highly coherent electron beam at distances as small as 100 μm from the tip.