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Integrated Planar Microlens And Its Applications
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1988
Year
EngineeringDevice IntegrationMicrolens ArrayMicro-optical ComponentOptical Fiber CommunicationsWafer Scale ProcessingMicroscale SystemIon Exchange TechnologyPhotonic Integrated CircuitElectronic PackagingMicrofluidicsPhotonicsElectrical EngineeringMicroelectronicsFlexible ElectronicsMicrofabricationApplied PhysicsPlanar MicrolensOptoelectronics
The paper describes a monolithically integrated planar microlens array and its applications. An ion exchange technology is applied to realize the microlens array with diameters of 10 - 1000 pm and N.A. of 0.25. Applications to optical fiber communications, combinations with CCD arrays and optical computing are demonstrated.