A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

Conduction Model of Metal Oxide Gas Sensors

Nicolae Bârsan, Udo Weimar · Journal of Electroceramics · 2001 · 2.6K citations

Natural Sciences, Materials Engineering, Materials Science +14

Semiconductor physics and devices

Materials Today · 2006 · 798 citations · Full text

Engineering, Materials Science, Physics +17

Environmental sensors based on micromachined cantilevers with integrated read-out

Anja Boisen, Jacob Thaysen, Henriette Jensenius et al. · Ultramicroscopy · 2000 · 268 citations

Engineering, Environmental Engineering, Mechanical Engineering +16

Surface state trapping models for SnO2-based microhotplate sensors

Junhua Ding, Thomas J. McAvoy, Richard E. Cavicchi et al. · Sensors and Actuators B Chemical · 2001 · 166 citations

Engineering, Materials Engineering, Materials Science +14

A novel surface-micromachined capacitive porous silicon humidity sensor

Z. M. Rittersma, Alexandra Splinter, André Bödecker et al. · Sensors and Actuators B Chemical · 2000 · 150 citations

Engineering, Materials Engineering, Materials Science +10