Tunable diode-laser induced fluorescence on Al and Ti atoms in low pressure magnetron discharges

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

Engineering, Atomic Collision Cascades, Atomic Emission Spectroscopy +17

ENERGY DEPENDENCE OF ION-INDUCED SPUTTERING YIELDS FROM MONATOMIC SOLIDS AT NORMAL INCIDENCE

Yasunori Yamamura, H. Tawara · Atomic Data and Nuclear Data Tables · 1996 · 727 citations

Materials Science, Materials Engineering, Ion Implantation +8

Argon ion laser-induced fluorescence with diode lasers

Greg Severn, D. Edrich, R. McWilliams · Review of Scientific Instruments · 1998 · 123 citations · Full text

Engineering, Laser Science, Laser-plasma Interaction +17

Anisotropic energies of sputtered atoms under oblique ion incidence

Maria Stepanova, S. K. Dew · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 53 citations

Engineering, Anisotropic Energies, Physics +5

Anisotropy effects in physical sputtering investigated by laser-induced fluorescence spectroscopy

A. Goehlich, N. Niemöller, H. F. Döbele · Physical review. B, Condensed matter · 2000 · 53 citations

Engineering, Physics, Atomic Emission Spectroscopy +15