Anisotropic energies of sputtered atoms under oblique ion incidence

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

Engineering, Atomic Collision Cascades, Atomic Emission Spectroscopy +17

On the energy distribution and angular distribution of sputtered particles

Hans E. Roosendaal, J.B. Sanders · Radiation Effects · 1980 · 81 citations

Estimates of differential sputtering yields for deposition applications

Maria Stepanova, S. K. Dew · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 78 citations

Materials Engineering, Ion Implantation, Engineering +15

Molecular dynamics studies of cluster emission in sputtering

G. Betz, W. Husinsky · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 77 citations

Cluster Science, Engineering, Nanocluster +7

Pair versus many-body potentials in atomic emission processes from a Cu surface

Heinrich Gades, Herbert M. Urbassek · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 65 citations

Surface Characterization, Engineering, Many-body Potentials +13