A methodology for the preparation of nanoporous polyimide films with low dielectric constants

Low dielectric constant polymers for microelectronics

G. Maier · Progress in Polymer Science · 2001 · 1.1K citations

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Low Dielectric Constant Materials for ULSI Interconnects

Michael Morgen, E. Todd Ryan, Jie-Hua Zhao et al. · Annual Review of Materials Science · 2000 · 387 citations

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Development of a Low-Dielectric-Constant Polymer for the Fabrication of Integrated Circuit Interconnect

Steven J. Martin, J. P. Godschalx, M. E. Mills et al. · Advanced Materials · 2000 · 337 citations · Full text

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Natural Sciences, Materials Engineering, Materials Science +14

Hybrid inorganic–organic materials based on a 6FDA–6FpDA–DABA polyimide and silica: physical characterization studies

Chris J. Cornelius, Eva Marand · Polymer · 2002 · 177 citations

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