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Evidence of coexistence of micro and nanoporosity of organo-silica polymeric films deposited on silicon by plasma deposition

Materials SciencePlasma DepositionEngineeringNanoporous MaterialMicrofabricationNanomaterialsSurface ScienceApplied PhysicsPolymer ScienceOrgano-silica Polymeric FilmsThin FilmsSilicon On InsulatorPlasma ProcessingChemical Vapor DepositionThin Film Processing