Applied Physics A · 2014 · 47 citations · 21 references
EngineeringManufacturing EngineeringDrillingMicrofabricationDrilling OperationsMicrofabrication MaterialsMicrofabrication ProcessesAir DrillingFemtosecond Laser PulsesHole Diameter SelectionLaser DrillingLaser MicromachiningPrecision Microfabrication
21
Micromachining of quartz with ultrashort laser pulses
H. Varel, David Ashkenasi, A. Rosenfeld et al. · Applied Physics A · 1997 · 210 citations