Reinvestigation of the carbon films prepared by ArF excimer laser-induced chemical vapor deposition

Abstract

It has already been reported by the authors [K. Kitahama, K. Hirata, H. Nakamatsu, S. Kawai, N. Fujimori, T. Imai, H. Yoshino, and A. Doi, Appl. Phys. Lett. 49, 634 (1986)] that the formation of diamond was confirmed in an ArF excimer laser-induced chemical vapor deposition experiment using acetylene as a carbon source. However, a careful reexamination of the reflection electron diffraction photographs afterward reveals that the deposit is something other than diamond. Raman spectra of the deposit were compared with those of other homologous substances. It is concluded that the structure of the deposit consists of individual graphite layers which are randomly translated parallel to the layers and rotated about the normal of the layers, although separations between individual graphite layers are kept constant. The structure is identical with that of the material known as a ‘‘heat-treated carbon black.’’