Applied Physics Letters · 2008 · 40 citations · 18 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesElectron Beam LithographyMetal-semiconductor ContactsNanoelectronicsNanostructured SurfacesSemiconductor NanomaterialsSemiconductor SurfacesColloidal NanoparticlesCoulomb BlockadeNanofabrication Of Nanoelectronic DevicesNanoparticlesSelective DepositionSilicon DioxideSingle-electron TransistorsSurface Contamination
We describe a method to pattern SiO2 surfaces with colloidal gold nanoparticles by e-beam lithography and selective nanoparticle deposition. The simple technique allows us to deposit nanoparticles in continuous straight lines, just one nanoparticle wide and many nanoparticles long. We contact the prepositioned nanoparticles with metal leads to form single electron transistors. The Coulomb blockade pattern surprisingly does not show the parasitic “offset charges” at low temperatures, indicating relatively little surface contamination.
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