Concepedia

Publication | Closed Access

Integration of through-wafer interconnects with a two-dimensional cantilever array

DOI

38

Citations

21

References

2000

Year

Eugene M. Chow, H. Tom Soh, H.C Lee, Jonathan D. Adams, S. C. Minne, G.G. Yaralioglu, A. Atalar, C. F. Quate, Thomas W. Kenny
Sensors and Actuators A Physical

References

YearCitations

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