Publication | Closed Access
High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology
55
Citations
11
References
2010
Year
Electrical EngineeringBiomedical SensorsEngineeringSensorsMicrofabricationMems TechnologyNovel ElectrodeSensor DesignHumidity SensorMicroelectronicsSensor TechnologyMicro-electromechanical System
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