Plasma-assisted deposition of hard material layers from organometallic precursors

Plasma-assisted chemical vapour deposition of TiN and TiC on steel: Properties of coatings

Tohru Arai, Hikari Fujita, Kazuyuki Oguri · Thin Solid Films · 1988 · 80 citations

Materials Science, Thermal Spray Coating, Chemical Engineering +8

Plasma-assisted chemical vapor deposition of titanium nitride in a capacitively coupled radio-frequency discharge

J. Laimer, H. Störi, P. Rödhammer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 43 citations

Materials Science, Electrical Engineering, High Temperature Materials +15

Plasma-assisted chemical vapour deposition with titanium amides as precursors

H.‐R. Stock, H. Berndt, Peter Mayr · Surface and Coatings Technology · 1991 · 25 citations

Materials Science, Chemical Engineering, Titanium Amides +5

Structure and properties of TiCx layers prepared by plasma-assisted chemical vapour deposition methods

Ch. Täschner, A. Leonhardt, M. Schönherr et al. · Materials Science and Engineering A · 1991 · 15 citations

Materials Engineering, Materials Science, Chemical Engineering +8