Concepedia

The deposition of AgC:H films: a tool to understand the role of carbide-forming metals in the MeC:H deposition process

J.T. Harnack, Carsten Benndorf

Materials Science and Engineering A · 1991 · 11 citations · 3 references

DOI

Concepts

References

3

Tribological and electrical properties of metal-containing hydrogenated carbon films

H. Dimigen, H. Hübsch, R. Memming · Applied Physics Letters · 1987 · 256 citations

, , +17

Identification of carbon and tantalum chemical states in metal-doped a-C:H films

Carsten Benndorf, M. Grischke, Hermann Koeberle et al. · Surface and Coatings Technology · 1988 · 27 citations

, , +9

Target effects during the deposition of Ti-a-C:H films

J.T. Harnack, F. Thieme, Carsten Benndorf · Surface and Coatings Technology · 1989 · 15 citations

, , +14