Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 13 citations · 0 references
International ComparisonEngineeringMeasurementCalibrationMm DiameterOptical TestingInterferometryEducationTime MetrologyInstrumentationIndependent MeasurementsPreliminary Experiment
Japanese Ultimate Flatness Interferometer (FUJI) is a Fizeau type flatness interferometer that is capable of measuring flatness over 310 mm diameter. The concept and technologies applied to FUJI are explained. To demonstrate the performance of FUJI, an international comparison was held with Australia, and the difference of two independent measurements were smaller than four nanometers.