Analysis, simulation and relative performances of two kinds of serpentine springs

Abstract

A complete set of approximate, closed-form expressions, obtained with small displacements theory, for the spring constants of two kinds of serpentine springs (classic and rotated) is presented. The expressions are proposed as a tool for rapid design of microelectromechanical structures. The two designs are also studied numerically using the finite element method (FEM): analytical calculations and FEM simulations are compared. A comparison between the performances of the two designs is also briefly presented.