Chemical vapor deposition of copper film from hexafluoroacetyl-acetonateCu(I)vinylcyclohexane

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Materials Science, Chemical Engineering, Ligand Decomposition +9

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Materials Science, Miniaturization, Nanoscale System +8

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Engineering, Silicon On Insulator, Copper Source/drain Metallization +16

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Materials Science, Inorganic Chemistry, Mechanistic Role +11