Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy

Analysis of a micro-electric generator for microsystems

C.B. Williams, R.B. Yates · Sensors and Actuators A Physical · 1996 · 1.4K citations

Engineering, Electrical Engineering, Microelectronics +11

Vibration-to-electric energy conversion

Scott Meninger, José Oscar Mur-Miranda, Rajeevan Amirtharajah et al. · IEEE Transactions on Very Large Scale Integration (VLSI) Systems · 2001 · 850 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Architectures for Vibration-Driven Micropower Generators

Paul D. Mitcheson, T.C. Green, Eric M. Yeatman et al. · Journal of Microelectromechanical Systems · 2004 · 749 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

Philippe Basset, Dimitri Galayko, Ayyaz Mahmood Paracha et al. · Journal of Micromechanics and Microengineering · 2009 · 225 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +15

Fabrication and characterization of a wideband MEMS energy harvester utilizing nonlinear springs

D S Nguyen, Einar Halvorsen, Geir Uri Jensen et al. · Journal of Micromechanics and Microengineering · 2010 · 153 citations

Engineering, Electrical Engineering, Mechanical Engineering +17