Concepedia

Publication | Closed Access

Etching of amorphous Al2O3 produced by ion implantation

DOI

22

Citations

5

References

1997

Year

C.J. McHargue, John Hunn, D.L. Joslin, E. Alves, M.F. da Silva, J.C. Soares
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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