Adhesive bonding with SU-8 in a vacuum for capacitive pressure sensors

Touch mode capacitive pressure sensors

Wen H. Ko, Qiang Wang · Sensors and Actuators A Physical · 1999 · 238 citations

Engineering, Sensors, Touch User Interface +4

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 215 citations

Electrical Engineering, Biomedical Sensors, Engineering +15

Batch-processed vacuum-sealed capacitive pressure sensors

A.V. Chavan, K.D. Wise · Journal of Microelectromechanical Systems · 2001 · 133 citations

Vacuum-sealed Reference Cavity, Engineering, Electronic Instrumentation +12

Fabrication of micronozzles using low-temperature wafer-level bonding with SU-8

Sheng Li, C. B. Freidhoff, Robert M. Young et al. · Journal of Micromechanics and Microengineering · 2003 · 88 citations

Engineering, Mechanical Engineering, Biomedical Engineering +16

A silicon directly bonded capacitive absolute pressure sensor

Fang He, Qing‐An Huang, Ming Qin · Sensors and Actuators A Physical · 2006 · 60 citations

Engineering, Sensor Design, Instrumentation +2