Concepedia
Thin Solid Films · 2008 · 23 citations · 17 references
Materials ScienceNanocomposite AluminaEngineeringApplied PhysicsDirect Current MagnetronThin Film DevicesThin Film Process TechnologyThin FilmsZirconia Thin FilmsChemical Vapor DepositionThin Film Processing
17
The Occurrence of Metastable Tetragonal Zirconia as a Crystallite Size Effect
R. C. Garvie · The Journal of Physical Chemistry · 1965 · 1.5K citations
Engineering, Altmetric Attention Score, Chemistry +16
Transformation toughening
F. F. Lange · Journal of Materials Science · 1982 · 647 citations
Control of reactive sputtering processes
W.D. Sproul, D.J. Christie, D.C. Carter · Thin Solid Films · 2005 · 392 citations
Engineering, Industrial Engineering, Reactive Sputtering Processes +8
Theoretical Evaluation of Zirconia and Hafnia as Gate Oxides for Si Microelectronics
Vincenzo Fiorentini, Gianluca Gulleri · Physical Review Letters · 2002 · 172 citations · Full text
Characterization of zirconia films deposited by r.f. magnetron sputtering
S. Ben Amor, B. Rogier, G. Baud et al. · Materials Science and Engineering B · 1998 · 138 citations
Materials Science, Magnetism, Materials Engineering +6