Modeling analysis of gas phase nucleation in silicon carbide chemical vapor deposition

Condensation of water vapour during supersonic expansion in nozzles

Philip G. Hill · Journal of Fluid Mechanics · 1966 · 423 citations

Engineering, Nucleation Theory, Fluid Mechanics +16

A Model of Silicon Carbide Chemical Vapor Deposition

Mark D. Allendorf, Robert J. Kee · Journal of The Electrochemical Society · 1991 · 194 citations

Materials Engineering, Materials Science, Engineering +12

Thermophoretic Deposition of Small Particles in the Modified Chemical Vapor Deposition (MCVD) Process

K. L. Walker, F. T. Geyling, S. R. Nagel · Journal of the American Ceramic Society · 1980 · 110 citations

Engineering, Vacuum Device, Chemistry +20

Silicon Carbide Epitaxy in a Vertical CVD Reactor: Experimental Results and Numerical Process Simulation

Roland Rupp, Yu.N. Makarov, H. Behner et al. · physica status solidi (b) · 1997 · 60 citations

Materials Science, Semiconductors, Electrical Engineering +12

Modeling of silicon carbide chemical vapor deposition in a vertical reactor

A.N. Vorob’ev, Yu. E. Egorov, Yu.N. Makarov et al. · Materials Science and Engineering B · 1999 · 20 citations

Engineering, Combustion Science, Applied Physics +6