Gallium arsenide as a mechanical material

Abstract

The aim of this work is to introduce GaAs as a mechanical material to those working primarily with silicon in micromechanics, and to give an update of the micromechanical properties of GaAs. Mechanical properties, some promising response mechanisms for micromechanical sensors, and recent micromechanical applications are reviewed for GaAs, and its best developed alloying system, the AlxGa1-xAs ternary.