Plasma Sources Science and Technology · 1994 · 196 citations · 15 references
Natural SciencesElectrical EngineeringPhysicsAtmospheric ElectricityMicrowave EngineeringPlasma PhysicsHigh-temperature PlasmasMicrowave System DesignPlasma ConfinementPlasma FundamentalsPlasma SourcesWaveguidesAtmospheric Pressure Plasma SourcesAtmospheric-pressure PlasmasEquivalent Circuit AnalysisEquivalent Circuit ModelingExperimental Results InterpretationLow-pressure Plasma SourcesMicrowave Plasma SourcesMicrowave Plasmas
We report theoretical and experimental investigations of an atmospheric pressure, microwave plasma torch with axial gas injection (torche a injection axiale design). It is a waveguide-based structure comprising both waveguide and coaxial elements serving the purpose of wavemode conversion and impedance-matching. The device includes features common to various waveguide-fed torches disclosed previously by other authors, but not yet modelled. Our paper provides a simple equivalent circuit description of the torch operation that accounts for its impedance-matching, power transfer to plasma and tuning characteristics, as verified experimentally. From the outcome of the model and using our experimental results, we introduce new features in the torch design that enable one to optimize its performance. We also examine ways of simplifying its structure and operation.
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Microwave-Supported Discharges
Andrew T. Zander, Gary M. Hieftje · Applied Spectroscopy · 1981 · 192 citations