Publication | Closed Access
Thermomechanical properties and mechanical stresses of Ge2Sb2Te5 films in phase-change random access memory
118
Citations
23
References
2008
Year
Materials ScienceMaterials EngineeringThermomechanical PropertiesEngineeringPhysicsGe2sb2te5 FilmsApplied PhysicsCondensed Matter PhysicsMechanical StressesMemory DeviceSemiconductor MemoryThin FilmsPhase Change Memory
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