A multisegment annular Si-detector system for RBS analysis

Fabrication of low noise silicon radiation detectors by the planar process

J. Kemmer · Nuclear Instruments and Methods · 1980 · 233 citations

Electrical Engineering, Wafer Scale Processing, Engineering +9

Nuclear microanalysis using MeV carbon ion backscattering; usefulness and applications

F. Abel, G. Amsel, M. Bruneaux et al. · Journal of Radioanalytical and Nuclear Chemistry · 1973 · 24 citations

Materials Science, Nuclear Microanalysis, Chemical Engineering +7

Electrical properties of silicon implanted with boron ions of MeV energy

Aleksander Kostka, S. Kalbitzer · Radiation Effects · 1973 · 17 citations

Engineering, Integrated Circuits, Silicon On Insulator +17

The detection sensitivity of heavy impurities in Si using 280 keV He2+ and C2+ back-scattering

R. R. Hart, H. L. Dunlap, A.J. Mohr et al. · Thin Solid Films · 1973 · 17 citations

Kev He2+, Engineering, Physics +7

Measurement of ultra-thin windows of ion implanted silicon detectors with low energy proton beams

H. Grahmann, S. Kalbitzer · Nuclear Instruments and Methods · 1976 · 16 citations

Ion Implantation, Physics, Applied Physics +5