Surface and Coatings Technology · 2000 · 30 citations · 12 references
Natural SciencesElectrical EngineeringPhysicsAtmospheric SciencePlasma PhysicsHigh-temperature PlasmasPlasma ConfinementPlasma DiagnosticsPlasma SourcesSpace PlasmasAtmospheric Pressure Plasma SourcesAtmospheric Pressure Plasma TreatmentAtmospheric-pressure PlasmasHollow Cathode DischargesHollow CathodesRadio-frequency Plasma Sources
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Microdischarge devices fabricated in silicon
J. W. Frame, D. J. Wheeler, T. A. DeTemple et al. · Applied Physics Letters · 1997 · 136 citations