Thin-Film Microfabrication of Electrochemical Transducers

Abstract

Thin-film technology provides definite advantages for producing small-dimension electrodes and electrochemical transducers. The aim of this review article is to describe the main technological steps of microfabrication. Three selected examples, derived from research in our laboratory, are used to illustrate basic concepts as well as some nonstandard processes available for the fabrication of thin-film Pt, Au, Ir and C microelectrodes.