Highly conductive and transparent ZnO:Al thin films prepared on high-temperature substrates by d.c. magnetron sputtering - Concepedia

Concepedia

Publication | Closed Access

Highly conductive and transparent ZnO:Al thin films prepared on high-temperature substrates by d.c. magnetron sputtering

80

Citations

11

References

1992

Year

Hirotaka Sato, Tadatsugu Minami, S. Takata, T. Mouri, N. Ogawa

Thin Solid Films

Materials ScienceAluminium NitrideEngineeringOxide ElectronicsApplied PhysicsThin FilmsD.c. Magnetron SputteringTransparent ZnoAl Thin FilmsThin Film Processing

References

	Year	Citations

Page 1