Thin Solid Films · 1992 · 80 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAluminum OxidesOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsAlumina Thin FilmsMagnetron SputteringSemiconductor Oxide Thin FilmsSputteringThin Oxide FilmsThin Oxide LayersTransparent Conducting FilmsZinc Oxides
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