Concepedia

Evidence for Oxidation Growth at the Oxide-Silicon Interface from Controlled Etch Studies

W. A. Pliskin, R. P. Gnall

Journal of The Electrochemical Society · 1964 · 82 citations · 0 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsInterface ScienceSurface ScienceEtching ProcessesOxidation ReactionsOxide SemiconductorsSemiconductor InterfacesSurface OxidationThin Film OxidationOxidationOxidation Defect FormationOxidation ProcessesOxide Growth KineticsSemiconductor OxidationSilicon OxidationSurface Oxidation Mechanisms