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Evidence for Oxidation Growth at the Oxide-Silicon Interface from Controlled Etch Studies
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Electrical EngineeringControlled Etch StudiesEngineeringOxidation ResistanceOxide ElectronicsSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorOxide-silicon InterfacePlasma EtchingOxidation Growth
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