The rate-controlling processes in the oxidation of HIPped Si3N4 with and without sintering additives

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Engineering, Oxidation Resistance, Chemistry +16

Surface Oxidation of Silicon Nitride Films

S. I. Raider, R. Flitsch, J. A. Aboaf et al. · Journal of The Electrochemical Society · 1976 · 245 citations

Materials Science, Si 2P, Engineering +11

Oxidation Studies of Crystalline CVD Silicon Nitride

Honghua Du, Richard E. Tressler, Karl E. Spear et al. · Journal of The Electrochemical Society · 1989 · 218 citations

Materials Science, Chemical Engineering, Engineering +11

Thermodynamics and kinetics of oxidation of hot-pressed silicon nitride

Subhash C. Singhal · Journal of Materials Science · 1976 · 198 citations

Materials Engineering, Materials Science, Engineering +6

Kinetics of Oxidation of Hot‐Pressed Silicon Nitride Containing Magnesia

Daniel Cubicciotti, K. H. Lau · Journal of the American Ceramic Society · 1978 · 131 citations

Materials Science, Materials Engineering, Chemical Engineering +13