Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)N films

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

Natural Sciences, Materials Science, Physics +12

Relationships between hardness, Young's modulus and elastic recovery in hard nanocomposite coatings

J. Musil, Filip Kunc, H. Zeman et al. · Surface and Coatings Technology · 2002 · 781 citations

Natural Sciences, Materials Engineering, Materials Science +14

Nanoindentation and Nanoscratching of Hard Carbon Coatings for Magnetic Disks

Ting Y. Tsui, George M. Pharr, W. C. Oliver et al. · MRS Proceedings · 1995 · 459 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

High-flux low-energy (≂20 eV) N+2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation

Lars Hultman, J.‐E. Sundgren, J. E. Greene et al. · Journal of Applied Physics · 1995 · 242 citations

Natural Sciences, Materials Engineering, Materials Science +17

Average energy deposited per atom: A universal parameter for describing ion-assisted film growth?

I. Petrov, F. Adibi, J. E. Greene et al. · Applied Physics Letters · 1993 · 224 citations

Natural Sciences, Materials Science, Physics +15