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High-cycle fatigue of micron-scale polycrystalline silicon films: fracture mechanics analyses of the role of the silica/silicon interface

Materials ScienceFracture Mechanics AnalysesEngineeringMechanical BehaviorMicrofabricationMechanical EngineeringApplied PhysicsSolid MechanicsMicrostructure-strength RelationshipSilica/silicon InterfaceSilicon On InsulatorLow-cycle FatigueMechanics Of MaterialsMicrostructureHigh-cycle Fatigue