Micromachined microsensors for manufacturing

Abstract

The rapid development of microelectromechanical systems (MEMS) technologies in recent years has provided a high degree of spatial miniaturization and integration of electromechanical components, which enable integrated sensing and control in manufacturing. This article provides an overview of the state of the art of micromachined microsensors for the measurement of mechanical signals in the manufacturing industry for automobiles, manufacturing, medical equipment, environment, robotics, food, and other consumer products. Measurements of pressure, acceleration, and acoustic emission (AE) are the three physical quantities that are most encountered in industrial and manufacturing applications. Discussed are the major design parameters of such microsensors, such as dynamic range, sensitivity, resolution, and accuracy and provide a real-world application. Also discussed are the issues related to the spatial integration of signal processing, power supply, and wireless communication with the sensing elements, which are of direct relevance to the overall performance of the microsensors.