Vacuum · 2008 · 19 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsCoatingsSurface CharacterizationSurface PhysicsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFilm Growth MechanismsMetal Thin FilmsSputter DepositionSputteringSputtering TechniquesSurface SputteringThin Film Surface CharacterizationThin-film Coatings
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