Concepedia

Publication | Open Access

Low temperature dopant activation of BF2 implanted silicon

DOIFull Paper Access

13

Citations

23

References

1991

Year

G. Queirolo, C. Bresolin, Davide Robba, M. Anderle, R. Canteri, A. Armigliato, G. Ottaviani, Stefano Frabboni
Journal of Electronic Materials

References

YearCitations

Page 1