Concepedia

Publication | Closed Access

Evaluation of fluorinated polyimide etching processes for optical waveguide fabrication

DOI

14

Citations

5

References

1999

Year

J.H. Kim, EunA Kim, Hwan-Young Choi, C.W. Kim, Jihoon Cho, Y.W. Lee, Bong‐Hyun You, Shuangshuang Yi, H.J. Lee, Kwansoo Han,
Thin Solid Films

References

YearCitations

Page 1