Influence of annealing on the concentration profiles of boron implantations in silicon

Solid Solubility and Diffusion Coefficients of Boron in Silicon

G. L. Vick, K. M. Whittle · Journal of The Electrochemical Society · 1969 · 175 citations

Natural Sciences, Materials Engineering, Materials Science +16

Technique for determining concentration profiles of boron impurities in substrates

J. F. Ziegler, G.W. Cole, J. E. E. Baglin · Journal of Applied Physics · 1972 · 142 citations

Natural Sciences, Materials Science, Physics +10

CHANNELING STUDY OF BORON-IMPLANTED SILICON

J. C. North, W. M. Gibson · Applied Physics Letters · 1970 · 118 citations

Engineering, Materials Engineering, Materials Science +17

THE LATTICE LOCATION OF BORON IONS IMPLANTED INTO SILICON

G. Fladda, K. Björkqvist, L. Eriksson et al. · Applied Physics Letters · 1970 · 89 citations

Engineering, Materials Engineering, Materials Science +9

Diffusion of Boron into Silicon

A. D. Kurtz, Ruby Yee · Journal of Applied Physics · 1960 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +17