Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering

Juliano Libardi, K. G. Grigorov, M. Massi, C. Otani, Sergio Persio Ravagnani, Homero Santiago Maciel, Marciel Guerino, Juan Manuel Jaramillo Ocampo

Thin Solid Films · 2004 · 15 citations · 11 references

Concepts

References

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