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Deformable mirrors with thermo-mechanical actuators for extreme ultraviolet lithography: Design, realization and validation

Materials ScienceEngineeringSoft RoboticsExtreme Ultraviolet LithographyMicrofabricationMechanical EngineeringMechanical SystemsBiomimetic ActuatorChemical ActuatorActuationDeformable MirrorsMicroactuatorThermo-mechanical Actuators3D Printing