Superconducting Lines Fabricated from Epitaxial Y-Ba-Cu-O Films

Abstract

High- T c superconducting lines as narrow as 0.8 µm, have been fabricated from Y-Ba-Cu-O films. The films were epitaxially grown on MgO (100) substrates heated at 740°C, by rf magnetron sputtering. The lines were patterned using focused ion-beam lithography and ion-beam etching. The resulting superconducting lines, 1.3 µm wide and 2 mm long, showed a zero resistance temperature of 81 K and a critical current density of 1.5×10 4 A/cm 2 at 77.3 K with smooth surfaces.